High-speed surface profilometry based on an adaptive microscope with axial chromatic encoding
Ding Luo
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202 Pages
English
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About This Book
An adaptive microscope with axial chromatic encoding is designed and developed, namely the AdaScope. With the ability to confocally address any locations within the measurement volume, the AdaScope provides the hardware foundation for a cascade measurement strategy to be developed, dramatically acce... (see more details)
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